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IJE TRANSACTIONS A: Basics Vol. 27, No. 1 (January 2014) 63-68
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ACCURATE MODEL OF CAPACITANCE FOR MEMS SENSORS USING CORRUGATED DIAPHRAGM WITH RESIDUAL STRESS
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B. Azizollah Ganji and M. Taybi
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( Received:
July 12, 2013
– Accepted: August 22, 2013 )
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Abstract
In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this
work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new
analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated
diaphragm and its relationship with residual stress. Then the capacitance and sensitivity of sensor using corrugated
diaphragm with residual stress are calculated under various parameters such as bias voltage and pressure. The analytical
results are compared with simulation using Finite Element Method (FEM). The results show that the new analytical model
is very close with simulation results.
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Keywords
residual stress, capacitance, corrugated diaphragm, sensor sensitivity
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چکیده
در این مقاله روش جدیدی برای محاسبه ظرفیت
خازنی سنسور میکروالکترومکانیکی با دیافراگم موج دار ارائه میشود. همچنین اثر تنش
پسماند بر روی جابجایی دیافراگم و ظرفیت خازنی سنسور در نظر گرفته میشود. در
ابتدا آنالیز تحلیلی برای بدست آوردن مقدار جابجایی مرکزی دیافراگم موج دار و
رابطهی آن با تنش پس ماند صورت میگیرد. سپس مقدار ظرفیت خازنی و حساسیت سنسور با
دیافراگم موج دار دارای تنش پسماند تحت ولتاژ بایاس و فشار بدست آورده میشود.
نتایج تحلیلی با شبیه سازی که با استفاده از روش اجزاء محدود انجام شده است،
مقایسه میشود. مقایسه نشان میدهد روش تحلیلی جدید به خوبی توانسته است نتایج
شبیه سازی را دنبال کند.
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