IJE TRANSACTIONS B: Applications Vol. 27, No. 8 (August 2014) 1243-1250   

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M. Azadia, A. Sabour Rouhaghdam and S. Ahangarani
( Received: May 24, 2013 – Accepted: November 07, 2013 )

Abstract    There are many factors such as voltages, duty cycle, pressure, temperatures and gas flux in coatings process that were effective in changing coatings characteristic. In this paper in plasma enhanced chemical vapor deposition (PECVD) technique, temperature and gas flux are two important variants that affecting the coatings structure and mechanical properties. All TiC coating deposited on a hot work tool steel (H13) had a thickness of 2-3 micrometer. The investigation of TiC coatings composition and structure were done with the grazing incidence XRD, the FTIR (Fourier Transformation Infrared Spectroscopy) and the Field Emission Scanning Electron Microscopy (FE-SEM). The mechanical properties of the coatings, such as hardness, wear resistance and surface roughness were studied with Vickers hardness indentation; pin on disk wear tests and atomic force microscopy, respectively. The best mechanical properties such as a high hardness (3100 VHN), wear resistance and fracture toughness (11.3MPa. m1/2) and low surface roughness (18 nm) were related to the coating that was deposited in 450°C.


Keywords    TiC, PACVD, Temperature, wear


چکیده    در تکنیک ترسیب از فاز بخار شیمیایی به کمک پلاسما، دما و سرعت شار گازی پارامترهای مهمی هستند که بر روی خصوصیات پوشش تأثیرگذار می­باشند. در این مقاله اثر این پارامترها بر روی رفتار مکانیکی پوشش کاربید تیتانیوم بر روی فولاد ابزار بررسی شده است. ترکیب و ساختار پوشش کاربید تیتانیوم با روش‌های پراش اشعه ایکس و اسپکتروسکوپی عبوری مادون قرمز فوریه مورد بررسی قرار گرفته­اند. خواص مکانیکی پوشش مانند میکروسختی، مقاومت به سایش، زبری سطحی به ترتیب با دستگاه فرورونده ویکرز، دستگاه سایش پین روی دیسک و میکروسکوپ نیروی اتمی مطالعه شده است. زمانی که دمای فرایند از 450 تا 490 درجه سانتی­گراد کاهش یابد و نسبت شار کلرید تیتانیوم به متان از 5/1 به 6 افزایش یابد، پوشش از خاکستری تیره به نقره­ای تغییر رنگ می­دهد. بهترین خواص مکانیکی مانند سختی بالا (3100 ویکرز)، مقاومت به سایش بالا و زبری سطحی کم، به پوششی مربوط است که دمای فرایند آن 450 درجه باشد.



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