Abstract




 
   

IJE TRANSACTIONS B: Applications Vol. 27, No. 8 (August 2014) 1243-1250   

downloaded Downloaded: 205   viewed Viewed: 2131

  EFFECT OF TEMPERATURE AND GAS FLUX ON THE MECHANICAL BEHAVIOR OF TIC COATING BY PULSED DC PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION(TECHNICAL NOTE)
 
M. Azadia, A. Sabour Rouhaghdam and S. Ahangarani
 
( Received: May 24, 2013 – Accepted: November 07, 2013 )
 
 

Abstract    There are many factors such as voltages, duty cycle, pressure, temperatures and gas flux in coatings process that were effective in changing coatings characteristic. In this paper in plasma enhanced chemical vapor deposition (PECVD) technique, temperature and gas flux are two important variants that affecting the coatings structure and mechanical properties. All TiC coating deposited on a hot work tool steel (H13) had a thickness of 2-3 micrometer. The investigation of TiC coatings composition and structure were done with the grazing incidence XRD, the FTIR (Fourier Transformation Infrared Spectroscopy) and the Field Emission Scanning Electron Microscopy (FE-SEM). The mechanical properties of the coatings, such as hardness, wear resistance and surface roughness were studied with Vickers hardness indentation; pin on disk wear tests and atomic force microscopy, respectively. The best mechanical properties such as a high hardness (3100 VHN), wear resistance and fracture toughness (11.3MPa. m1/2) and low surface roughness (18 nm) were related to the coating that was deposited in 450°C.

 

Keywords    TiC, PACVD, Temperature, wear

 

چکیده    در تکنیک ترسیب از فاز بخار شیمیایی به کمک پلاسما، دما و سرعت شار گازی پارامترهای مهمی هستند که بر روی خصوصیات پوشش تأثیرگذار می­باشند. در این مقاله اثر این پارامترها بر روی رفتار مکانیکی پوشش کاربید تیتانیوم بر روی فولاد ابزار بررسی شده است. ترکیب و ساختار پوشش کاربید تیتانیوم با روش‌های پراش اشعه ایکس و اسپکتروسکوپی عبوری مادون قرمز فوریه مورد بررسی قرار گرفته­اند. خواص مکانیکی پوشش مانند میکروسختی، مقاومت به سایش، زبری سطحی به ترتیب با دستگاه فرورونده ویکرز، دستگاه سایش پین روی دیسک و میکروسکوپ نیروی اتمی مطالعه شده است. زمانی که دمای فرایند از 450 تا 490 درجه سانتی­گراد کاهش یابد و نسبت شار کلرید تیتانیوم به متان از 5/1 به 6 افزایش یابد، پوشش از خاکستری تیره به نقره­ای تغییر رنگ می­دهد. بهترین خواص مکانیکی مانند سختی بالا (3100 ویکرز)، مقاومت به سایش بالا و زبری سطحی کم، به پوششی مربوط است که دمای فرایند آن 450 درجه باشد.

References   

 

1.         Boving, H. and Hintermann, H., "Wear-resistant hard titanium carbide coatings for space applications", Tribology International,  Vol. 23, No. 2, (1990), 129-133.

2.        .Moriwaki, H., Kitajima, S., Shirai, K., Kiguchi, K. and Yamada, O., "Application of the powder of porous titanium carbide ceramics to a reusable adsorbent for environmental pollutants", Journal of Hazardous Materials,  Vol. 185, No. 2, (2011), 725-731.

3.        Shanaghi, A., Rouhaghdam, A.R.S., Ahangarani, S., Chu, P.K. and Farahani, T.S., "Effects of duty cycle on microstructure and corrosion behavior of tic coatings prepared by dc pulsed plasma CVD", Applied Surface Science,  Vol. 258, No. 7, (2012), 3051-3057.

4.        Kim, D.-J., Cho, Y.-R., Lee, M.-J., Hong, J.-M., Kim, Y.-K. and Lee, K.-H., "Properties of tin–tic multilayer coatings using plasma-assisted chemical vapor deposition", Surface and Coatings Technology,  Vol. 116, (1999), 906-910.

5.        Shanaghi, A., Rouhaghdam, A.R.S., Ahangarani, S. and Chu, P.K., "Effect of plasma cvd operating temperature on nanomechanical properties of tic nanostructured coating investigated by atomic force microscopy", Materials Research Bulletin,  Vol. 47, No. 9, (2012), 2200-2205.

6.        Wang, H., He, J. and Hon, M., "Sliding wear resistance of ticn coatings on tool steel made by plasma-enhanced chemical vapour deposition", Wear,  Vol. 169, No. 2, (1993), 195-200.

7.        Kawata, K., Sugimura, H. and Takai, O., "Effects of chlorine on tribological properties of tin films prepared by pulsed dc plasma-enhanced chemical vapor deposition", Thin Solid Films,  Vol. 407, No. 1, (2002), 38-44.

8.        Arai, T., Fujita, H. and Oguri, K., "Plasma-assisted chemical vapour deposition of tin and tic on steel: Properties of coatings", Thin Solid Films,  Vol. 165, No. 1, (1988), 139-148.

9.        Jarms, C., Stock, H.-R., Berndt, H., Bartsch, K., Leonhardt, A. and Arnold, B., "Influence of the pacvd process parameters on the properties of titanium carbide thin films", Surface and Coatings Technology,  Vol. 98, No. 1, (1998), 1547-1552.

10.     Archer, N.J., "The plasma assisted chemical vapor deposition of tic, tin and, ticn.", Thin Solid Films,  Vol. 80,, (1980), 221-225.

11.     Tandermeet, A.F.G., "Nuclear instruments and method in physcis research", science,  Vol. 528, (2006), 8-14.

12.     Liepack, H., Bartsch, K., Brückner, W. and Leonhardt, A., "Mechanical behavior of pacvd tic–amorphous carbon composite layers", Surface and Coatings Technology,  Vol. 183, No. 1, (2004), 69-73.

13.     Oguri, K. and Arai, T., "Friction coefficient of Si- C, Ti- C and Ge- C coatings with excess carbon formed by plasma-assisted chemical vapour deposition", Thin Solid Films,  Vol. 208, No. 2, (1992), 158-160.

14.     Avila, J.E. and Jaramilla, H.E., "Synthesis and characterization of ti alcn via mechanical alloying", Journal of Science and Industrial Research,  Vol. 69, (2010), 773-776.

15.     Holmberg, K., Matthews, A. and Ronkainen, H., "Coatings tribology—contact mechanisms and surface design", Tribology International,  Vol. 31, No. 1, (1998), 107-120.

16.     Lee, J., Euh, K., Oh, J.C. and Lee, S., "Microstructure and hardness improvement of tic/stainless steel surface composites fabricated by high-energy electron beam irradiation", Materials Science and Engineering: A,  Vol. 323, No. 1, (2002), 251-259.

17.     Pirso, J., Viljus, M. and Letunovits, S., "Sliding wear of tic–nimo cermets", Tribology International,  Vol. 37, No. 10, (2004), 817-824.

18.     Tang, J., Zabinski, J.S. and Bultman, J.E., "Tic coatings prepared by pulsed laser deposition and magnetron sputtering", Surface and Coatings Technology,  Vol. 91, No. 1, (1997), 69-73.

19.     Liu, D.J., Tu, G.P., Gu, C.D., Chen, R. and Hong, C.F.T., "Ribological and mechanical behaviors of tin/cnx multilayer films deposited by magnetron sputtering", Thin Solid Films,  Vol. 5, No. 19, (2011), 4842-4848.

20.     Senthil Kumar, A., Raja Durai, A. and Sornakumar, T., "Wear behaviour of alumina based ceramic cutting tools on machining steels", Tribology International,  Vol. 39, No. 3, (2006), 191-197.

21.     Vleugels, J., "Fabrication, wear and performance of ceramic cutting tools", Advances in Science and Technology,  Vol. 45, (2006), 1776-1785.

22.     Kumar, N., Krishnan, R., Dinesh Kumar, D., Dash, S. and Tyagi, A., "Tribological properties of nanostructured tic coatings deposited on steel and silicon substrates using pulse laser deposition technique", Tribology-Materials, Surfaces & Interfaces,  Vol. 5, No. 1, (2011), 1-9.

23.     Fang, T.-H., Jian, S.-R. and Chuu, D.-S., "Nanomechanical properties of tic, tin and ticn thin films using scanning probe microscopy and nanoindentation", Applied Surface Science,  Vol. 228, No. 1, (2004), 365-372.

24.     Rasel, S., Wang, Y., Ku, H., Byeon, J., Kim, T. and Song, J., "Determination of fracture toughness of amorphous carbon coatings using indentation method",  Korea, (2011).

25.     Miyazaki, H., Hyuga, H., Yoshizawa, Y.-i., Hirao, K. and Ohji, T., "Relationship between fracture toughness determined by surface crack in flexure and fracture resistance measured by indentation fracture for silicon nitride ceramics with various microstructures", Ceramics International,  Vol. 35, No. 1, (2009), 493-501.

26.     .Chicot, D., Duarte, G., Tricoteaux, A., Jorgowski, B., Leriche, A. and Lesage, J., "Vickers indentation fracture (vif) modeling to analyze multi-cracking toughness of titania, alumina and zirconia plasma sprayed coatings", Materials Science and Engineering: A,  Vol. 527, No. 1, (2009), 65-76.   .





International Journal of Engineering
E-mail: office@ije.ir
Web Site: http://www.ije.ir