Abstract    In the design of high Quality factor (Q) micro or nano beam resonators, different dissipation mechanisms may have damaging effects on the quality factor. One of the major dissipation mechanisms is the thermoelastic damping (TED) that needs an accurate consideration for prediction. In this paper, thermoelastic damping of the longitudinal vibration of a homogeneous micro beam with both ends clamped have been investigated. A Galerkin method has been used to analyze thermoelastic damping for the first mode of vibration of the micro beam. Then the quality factor and longitudinal vibrations frequency are obtained. Changing of Quality factor versus geometrical properties and ambient temperature for different materials are plotted.

Keywords    Quality Factor, Thermoelastic Damping, Longitudinal Vibrations, Coupled Equations, Galerkin Method, Natural Frequency

چکیده    در طراحی فاکتور کیفیت بالا، مکانیزم های اتلافی میکرو و نانو تیرها می توانند تاثیر منفی روی فاکتور کیفیت داشته باشند. یکی از مکانیزم های اتلافی مهم ترموالاستیک دمپینگ می باشد که برای پیش بینی آن نیازمند مطالعات دقیقی هستیم. در این مقاله به بررسی ترموالاستیک دمپینگ ارتعاشات طولی در یک میکرو تیر همگن دو سر گیر دار می پردازیم. برای تحلیل ترموالاستیک دمپینگ در مود ارتعاشی اول میکرو تیر، روش گلرکین مورد استفاده قرار گرفته است. سپس فاکتور کیفیت و فرکانس ارتعاشات طولی بدست آمده است. نحوه تغییرات فاکتور کیفیت نسبت به ابعاد و دمای محیط برای جنس های مختلف ترسیم شده است

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