IJE TRANSACTIONS C: Aspects Vol. 30, No. 6 (June 2017) 846-850    Article in Press

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M. Yari Esbouei, Y. Hezarjaribi and B. A. Ganji
( Received: February 03, 2017 – Accepted in Revised Form: April 21, 2017 )

Abstract    This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method increased the effective surface of capacitor and the displacement of movable electrode. The size of this sensor is 250250 m2 and the thickness of diaphragm is 1m with 1 m air gap. According to the results the sensitivity of sensor is 58.5


Keywords    BioMEMS, capacitive pressure sensor, Small size, High sensitivity, Mechanical coupling.


چکیده    این مقاله حسگر فشار خازنی MEMS را ارائه داده است. در این طراحی الکترود متحرک مانند یک صفحه ثابت حرکت میکند که میزان جابهجایی آن برابر با حداکثر جابهجایی مرکزی دیافراگم است. جنس دیافراگم، الکترود متحرک و کوپلینگ مکانیکی به ترتیب پلی سیلیکون، طلا و Si3N4 است. همچنین، الکترود ثابت از طلا و زیر لایه از شیشهی پیرکس تشکیل شده است. روش پیشنهادی موجب افزایش سطح موثر صفحات خازن و افزایش جابهجایی الکترود متحرک میشود. اندازهی این حسگر برابر است با 250250 میکرومترمربع، ضخامت دیافراگم 1 میکرومتر و فاصلهی هوایی 1 میکرومتر میباشد. مطابق با نتایج حساسیت حسگر 58.5 است.


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